Product Introduction:
This instrument is an integrated Raman spectrometer that can perform eyepiece observation, camera imaging, Raman spectroscopy detection, and Raman spectroscopy imaging on samples.
The instrument consists of a Raman spectrometer, a Raman confocal module, and a large platform detection microscope.
characteristic:
1.all-newMXLarge platform inspection microscope, maximum support300mmWafer and17Inspection of inch LCD panel, including4、6、8、12Multiple inch turntables, suitable for wafer inspection of different sizes.
2.It is possible to simultaneously insert three Raman spectrometer detection modules with different wavelengths, and switch between different spectrometers on the software to achieve fast and automatic detection of multi wavelength Raman spectroscopy.
3.Can support405nm、532nm、633nm、785nm、830nm、1064nmMultiple wavelengths can be matched with spectrometers of different performance, such as non cooled, cooled, deep cooled, etc., to meet customers' different needs for samples and detection accuracy.
4.If an automatic platform is selected, it can also achieve automatic point scanning for hyperspectral imaging.
technical parameter
Microscope parameters:
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optical system |
Infinite optical system |
focusing system |
Coarse micro coaxial focusing, micro grid value: 1 micron |
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Maximum travel: 35mm |
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eyepiece |
Large field of view (25mm field of view) |
Objective lens rotator |
Six hole converter |
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objective lense |
5X, 10X, 20X, 50X, 100X Infinite bright dark field semi vanishing metallographic objective lens |
Carrier platform |
Platform area: 718X420 |
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Mobile range: 356X305 |
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Equipped with clutch handle |
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Electric platform |
Platform area: 495X641 |
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Mobile range: 306XXI06 |
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Repetition accuracy: (3+L/50)um |
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lighting |
Light and dark field reflection illumination device |
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Built in field of view/aperture light barrier |
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Slot with color filter and polarizing device |
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Three eye tube |
Pupil distance 55mm-75mm, |
CCD adaptive lens |
0.5X C-mount |
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Spectral ratio: 50/50, 100/0, 0/100 |
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Observation method |
Bright field, dark field, polarization DIC |
other |
High precision micrometer |
Packaging List
Raman spectrometer parameters:
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Raman spectral range |
200-3600cm-1 |
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resolving power |
< 15cm-1@25 μm slit |
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Laser |
532 ± 1nm, linewidth ≤ 0.2nm |
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Laser power stability |
≤3% P-P(@2hrs) |
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output power |
0-100mW adjustable |
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Filter laser cut-off depth |
OD8 |
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working temperature |
0-40℃ |
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Working humidity |
5-80% |
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Laser lifespan |
5000hrs |
